- Cleanroom interface chamber
- Electronics: CIC
Универсальный русско-английский словарь. Академик.ру. 2011.
Cleanroom interface chamber
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Thermal oxidation — In microfabrication, thermal oxidation is a way to produce a thin layer of oxide (usually silicon dioxide) on the surface of a wafer (semiconductor). The technique forces an oxidizing agent to diffuse into the wafer at high temperature and react… … Wikipedia
